Filter functioning with acoustic waves

Details Filter functioning with acoustic waves Filter functioning with acoustic waves

1985-12-27

1987-07-21

Nussbaum, Marvin L.

Wave transmission lines and networks

Coupling networks

Electromechanical filter

29 2535, 310313D, 427100, H03H 9145, H03H 964, H01L 4104

Patent

active

046821309

ABSTRACT:
Digital structures of a surface wave filter are manufactured in a photolithographic method with a lift-off or with an etching technique. The surface wave filter comprises at least one resonator structure, this resonator structure having auxiliary coatings of the substrate surface allocated to it. These auxiliary coatings are continuations of existing, neighboring pads which compensate during an exposure step associated with manufacture of the digital structures.

REFERENCES:
patent: 4130813 (1978-12-01), Sandy et al.
patent: 4325037 (1982-04-01), Bulst et al.

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