X-ray or gamma ray systems or devices – Beam control – Filter
Reissue Patent
2004-03-18
2011-12-20
Kiknadze, Irakli (Department: 2882)
X-ray or gamma ray systems or devices
Beam control
Filter
C378S158000
Reissue Patent
active
RE043036
ABSTRACT:
An apparatus, suited, for example, for extreme ultraviolet lithography, includes a radiation source and a processing organ for processing the radiation from the radiation source. Between the radiation source and the processing organ a filter is placed which, in the radial direction from the radiation source, comprises a plurality of foils or plates.
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ASML Netherlands B.V.
Kiknadze Irakli
Pillsbury Winthrop Shaw & Pittman LLP
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