Filter device

Details Filter device Filter device

1994-05-18

1995-07-18

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

355 53, G03B 2752, G03B 2742

Patent

active

054346444

ABSTRACT:
A filter device for a resist-treatment system, comprising a frame having an aperture through which the outside air is introduced into the resist-treatment system, a fan unit for sucking the outside air into the aperture, and a filter element supported by means of the frame so as to be situated at least on one side the fan unit, the filter element including a porous body containing an acid component capable of adsorbing an alkali component by reaction.

REFERENCES:
patent: 4760423 (1988-07-01), Holtje et al.
patent: 5023654 (1991-06-01), Matsumoto et al.
patent: 5130743 (1992-07-01), Katoh et al.
patent: 5143552 (1992-09-01), Moriyama

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