Filter apparatus for use with an x-ray source

X-ray or gamma ray systems or devices – Source

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378 34, 378122, G01N 2320

Patent

active

048377945

ABSTRACT:
Filter apparatus for use in x-ray equipment including a repetitively pulsed x-ray source, a window for transmitting x-rays generated by the source to an object to be irradiated, and a vacuum chamber containing the x-ray source and the filter apparatus. The filter apparatus includes a baffle for diffusing hot gases and directing them away from the window. The filter apparatus further includes an ultraviolet light absorber which overlies the window with respect to the x-ray source whereby undesirable components generated with the x-rays by the x-ray source are substantially eliminated prior to reaching the window. Also disclosed is a method of eliminating undersirable by-products of x-ray generation.

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Pearlman et al., "X-Ray Lithography Using A Pulsed Plasma Source," J. Vac. Sci. Technol, vol. 19, No. 4, Nov./Dec. 1981, pp. 1190-1193.
J. D. Hares; A Simple CE X-Ray Source For Laser Plasma X-Ray Diagnostic Alignment; Nov. 1981; pp. 1306-1307.

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