Stock material or miscellaneous articles – Web or sheet containing structurally defined element or... – Physical dimension specified
Patent
1998-04-10
2000-09-05
Nakarani, D. S.
Stock material or miscellaneous articles
Web or sheet containing structurally defined element or...
Physical dimension specified
427509, 427515, 428446, 428447, 428450, B32B 712
Patent
active
061140325
ABSTRACT:
The present invention provides thin films for use in microelectronic devices. In one aspect, the present invention provides a copper diffusion barrier. In another aspect, the present invention provides a polymer film for various applications including use as a dielectric insulator and surface modification layers. Methods for the production of the films are also disclosed.
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Nakarani D. S.
The University of North Texas
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