Optical waveguides – Planar optical waveguide – Thin film optical waveguide
Reexamination Certificate
2005-06-27
2009-02-24
Font, Frank G (Department: 2883)
Optical waveguides
Planar optical waveguide
Thin film optical waveguide
C385S129000, C385S131000, C385S132000, C264S001240, C427S163200
Reexamination Certificate
active
07496266
ABSTRACT:
A method of manufacturing a film waveguide includes supplying a precursor consisting of monomer or oligomer of an elastomer having a flexural modulus after curing smaller than or equal to 1,000 MPa to a substrate; pressing a stamper on the precursor of the elastomer, applying pressure to the precursor of the elastomer by the stamper and thinning a film thickness of the precursor of the elastomer; forming a lower clad layer by curing the precursor of the elastomer; forming a core on the lower clad layer; and forming an upper clad layer on the lower clad layer and the core. A film waveguide has at least one of a lower clad layer or an upper clad layer formed by an elastomer having a flexural modulus smaller than or equal to 1,000 MPa. A sum of film thicknesses of the clad layers is less than or equal to 300 mm.
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patent: 6807328 (2004-10-01), Farah
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Enami Akira
Fujisaki Tamio
Hosokawa Hayami
Ishida Yoshihisa
Anderson Guy G
Font Frank G
OMRON Corporation
Osha • Liang LLP
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