Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-11-01
2005-11-01
Smith, Zandra V. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S451000, C436S016000
Reexamination Certificate
active
06961131
ABSTRACT:
A standard pattern of a differential value of an interference light is set with respect to a predetermined film thickness of a first member to be processed. The standard pattern uses a wavelength as a parameter. Then, an intensity of an interference light of a second member to be processed, composed just like the first member, is measured with respect to each of a plurality of wavelengths so as to obtain a real pattern of an differential value of the measured interference light intensity. The real pattern also uses a wavelength as a parameter. Then, the film thickness of the second member is obtained according to the standard pattern and the real pattern of the differential value.
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U.S. Appl. No. 09/946,504.
Fujii Takashi
Kaji Tetsunori
Usui Tatehito
Yoshigai Motohiko
Antonelli, Terry Stout and Kraus, LLP.
Connolly Patrick J.
Opnext Japan, Inc.
Smith Zandra V.
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