Film thickness measuring capacitive sensors

Details Film thickness measuring capacitive sensors Film thickness measuring capacitive sensors

1996-09-10

1998-04-21

Brown, Glenn W.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

324663, 324687, 324690, G01N 2722, G01R 2726

Patent

active

057421676

ABSTRACT:
A capacitive technique for measuring the thickness of non-conductive, flexible sheet material consists of placing the sheet material over the gap between a pair of coaxial electrodes, the electrodes defining a sensor surface, and keeping the sheet material spaced from the sensor surface by establishing a layer of gas therebetween.

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patent: 5077522 (1991-12-01), Lahitte et al.
patent: 5270664 (1993-12-01), McMurtry et al.

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