Film thickness inspection method and apparatus

Details Film thickness inspection method and apparatus Film thickness inspection method and apparatus

1996-06-17

1998-06-30

McPherson, John A.

Radiation imagery chemistry: process, composition, or product th

Including control feature responsive to a test or measurement

430 7, 25055928, 356239, 356371, G01B 1130

Patent

active

057731730

ABSTRACT:
A color filter thickness uniformity is evaluated quantitatively and accurately at high sensitivity by using a wavelength deviating by a predetermined wavelength from a central wavelength. The whole output of a screen is unified into one color tone by a monochromatic mask set between a white light source and a color filter to mask picture elements other than those with a specific color tone. The light emitted from the screen is filtered by a filter having a wavelength .lambda..sub.1 deviating by a predetermined wavelength .DELTA..lambda. from the central wavelength .lambda..sub.0 of the one color tone as the central wavelength, and the intensity of the filtered light is detected for each position on the screen to evaluate the intensity of the light detected for each position on the screen by a method such as image processing.

REFERENCES:
patent: 5619330 (1997-04-01), Ehemann et al.

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