Film testing

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – By loading of specimen

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73790, G01D 116

Patent

active

055178600

ABSTRACT:
Measurement of stress-strain relationships in thin films using substantially flat, parallel test surfaces with minimal width.

REFERENCES:
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patent: 5074983 (1991-12-01), Eltoukhy et al.
patent: 5255562 (1993-10-01), Yamamoto et al.
patent: 5299450 (1994-04-01), Nakagawa et al.
Benecke, W., Silicon-microactuators: activation mechanisms and scaling problems, Tansducers '91. 1991 International Conference on Solid-State Sensors and Actuators, Digest of Technical Papers, Jun. 1991.

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