Film temperature sensor and temperature sensing substrate

Details Film temperature sensor and temperature sensing substrate Film temperature sensor and temperature sensing substrate

2005-08-12

2009-02-24

Lee, Kyung (Department: 2832)

Electrical resistors

With base extending along resistance element

C338S025000

Reexamination Certificate

active

07495542

ABSTRACT:
A film-like temperature sensor for more accurately measuring the temperatures at plural locations on the surface of a semiconductor wafer comprises a base film made of an insulating material; plural thin-film thermal elements for sensing temperature; plural thin-film leads, connected to the thermal elements; and plural thin-film terminals connected to the ends of the leads. The thermal elements, leads, and terminals are integrally formed either on the surface or in the thickness of the base film. The base film has a flat shape like a paddle, and comprises a head portion to be attached to the surface of a semiconductor wafer, and a strip-shaped tail portion extending outwardly of the semiconductor wafer. The plural thermal elements are arranged on the head portion in the form of either a concentric circle, spiral, matrix, or raster, and the plural terminals are arranged on the tail portion.

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patent: 2000-241257 (2000-09-01), None

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