Film stress measurement system having first and second stage mea

Details Film stress measurement system having first and second stage mea Film stress measurement system having first and second stage mea

1989-05-26

1992-06-02

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356376, G01V 904

Patent

active

051189550

ABSTRACT:
A system for measuring the curvature of a surface includes a laser for emitting a beam of light to be incident upon the surface; a photodetector for detecting light reflected by the surface; a first stage for selectively moving the surface in a direction normal to the direction of the incident beam; a second stage for selectively moving the photodetector in a direction normal to the reflected beam; a sensor connected to the photodetector for detecting the displacement of the reflected beam relative to the photodetector.

REFERENCES:
patent: 3406292 (1968-10-01), Geier et al.
patent: 4145140 (1979-03-01), Fujii
patent: 4297034 (1981-10-01), Ito et al.
patent: 4672196 (1987-06-01), Canino
patent: 4815857 (1989-03-01), Bragd
patent: 4900940 (1990-02-01), Nakamura

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