Stock material or miscellaneous articles – Structurally defined web or sheet – Including components having same physical characteristic in...
Reexamination Certificate
2007-09-11
2007-09-11
Zacharia, Ramsey (Department: 1773)
Stock material or miscellaneous articles
Structurally defined web or sheet
Including components having same physical characteristic in...
C428S422000, C428S500000, C428S702000
Reexamination Certificate
active
10880818
ABSTRACT:
A film stack and method of forming a film stack are provided in which a first film is disposed on a substrate and a second film has an inner surface disposed on the first film. The second film has a thickness smaller than a reference thickness at which the second film would begin to dewet from the substrate if the second film were disposed directly on the substrate. However, the second film is substantially free of dewetting defects because it is disposed overlying the first film which has a first Hamaker constant having a negative value with respect to the substrate.
REFERENCES:
patent: 3681019 (1972-08-01), Dean
patent: 4317861 (1982-03-01), Kidoh et al.
patent: 6139697 (2000-10-01), Chen et al.
patent: 2002/0134449 (2002-09-01), Nishi et al.
D. E. Seeger et al., “Thin-film Imaging: Past, Present, Prognosis,”IBM Jnl. Res. Develop.(Optical Lithography) vol. 41, No. 1/2, p. 105 (1997).
D. Taylor et al., “Measuring and Accessing Printability of Reticle Pinhole Defects,”Proc. SPIE(18th Europ. Conf. On Mask Technology for Integrated Circuits and Microcomponents , vol. 4764, pp. 202-209 (2002) (Abstract Only).
G. Reiter et al., “Thin Film Instability Induced By Long Range Forces,”Langmuir, vol. 15, pp. 2551-2558 (1999).
R. Seemann et al., “Dewetting Patterns and Molecular Forces: A Reconciliation,”Physical Review Letters, vol. 86, No. 24, pp. 5534-5537 (2001).
S. Nir, “Van Der Waals Interactions Between Surfaces of Biological Interest,”Progress In Surface Science, vol. 8, No. 1, pp. 1-58 (1976).
J. N. Israelachvili,Intermolecular and Surface Forces(London Academic Press), pp. 176-209, Chapter 11.
Brodsky Colin J.
Li Wai-Kin
Scheer Steven A.
C. Li Todd M.
Neff Daryl
Zacharia Ramsey
LandOfFree
Film stack having under layer for preventing pinhole defects does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Film stack having under layer for preventing pinhole defects, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Film stack having under layer for preventing pinhole defects will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3782365