Film stack having under layer for preventing pinhole defects

Stock material or miscellaneous articles – Structurally defined web or sheet – Including components having same physical characteristic in...

Reexamination Certificate

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C428S422000, C428S500000, C428S702000

Reexamination Certificate

active

10880818

ABSTRACT:
A film stack and method of forming a film stack are provided in which a first film is disposed on a substrate and a second film has an inner surface disposed on the first film. The second film has a thickness smaller than a reference thickness at which the second film would begin to dewet from the substrate if the second film were disposed directly on the substrate. However, the second film is substantially free of dewetting defects because it is disposed overlying the first film which has a first Hamaker constant having a negative value with respect to the substrate.

REFERENCES:
patent: 3681019 (1972-08-01), Dean
patent: 4317861 (1982-03-01), Kidoh et al.
patent: 6139697 (2000-10-01), Chen et al.
patent: 2002/0134449 (2002-09-01), Nishi et al.
D. E. Seeger et al., “Thin-film Imaging: Past, Present, Prognosis,”IBM Jnl. Res. Develop.(Optical Lithography) vol. 41, No. 1/2, p. 105 (1997).
D. Taylor et al., “Measuring and Accessing Printability of Reticle Pinhole Defects,”Proc. SPIE(18th Europ. Conf. On Mask Technology for Integrated Circuits and Microcomponents , vol. 4764, pp. 202-209 (2002) (Abstract Only).
G. Reiter et al., “Thin Film Instability Induced By Long Range Forces,”Langmuir, vol. 15, pp. 2551-2558 (1999).
R. Seemann et al., “Dewetting Patterns and Molecular Forces: A Reconciliation,”Physical Review Letters, vol. 86, No. 24, pp. 5534-5537 (2001).
S. Nir, “Van Der Waals Interactions Between Surfaces of Biological Interest,”Progress In Surface Science, vol. 8, No. 1, pp. 1-58 (1976).
J. N. Israelachvili,Intermolecular and Surface Forces(London Academic Press), pp. 176-209, Chapter 11.

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