Film stack for manufacturing micro-electromechanical systems...

Details Film stack for manufacturing micro-electromechanical systems... Film stack for manufacturing micro-electromechanical systems...

2006-03-31

2009-11-10

Hasan, Mohammed (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000

Reexamination Certificate

active

07616369

ABSTRACT:
This invention provides a precursor film stack for use in the production of MEMS devices. The precursor film stack comprises a carrier substrate, a first layer formed on the carrier substrate, a second layer of an insulator material formed on the first layer, and a third layer of a sacrificial material formed on the second layer.

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