Film-processing method and film-processing apparatus

Details Film-processing method and film-processing apparatus Film-processing method and film-processing apparatus

2005-06-07

2005-06-07

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C355S068000, C355S077000, C250S492200, C430S030000, C430S311000

Reexamination Certificate

active

06903800

ABSTRACT:
A film-processing method according to the present invention includes: a processing step of irradiating electron beams onto a film on a surface of an object to be processed to conduct a process to the film; an electric-current measuring step of capturing the electron beams in a vicinity of the object to be processed to measure an electric-current value during the processing step; and a detecting step of detecting an end point of the process to the film, based on an amount of electron obtained by means of a time integration of the electric-current value. According to the present invention, a suitable irradiation of the electron beams onto the film on a surface of the object to be processed can be realized. Thus, a suitable film quality can be obtained.

REFERENCES:
patent: 5032217 (1991-07-01), Tanaka
patent: 5332464 (1994-07-01), Namose
patent: 5723236 (1998-03-01), Inoue et al.
patent: 3-016125 (1991-01-01), None

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