Film peeling method and apparatus

Details Film peeling method and apparatus Film peeling method and apparatus

1988-10-14

1989-11-14

Dawson, Robert A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156584, B32B 3118

Patent

active

048804886

ABSTRACT:
An apparatus for peeling a film from a substrate is disclosed which comprises: film peeling guide members for setting a direction of peeling of the film; peeling members for peeling off a part of the film and sticking the part onto the film peeling guide members; a film conveying subsystem for supporting the film stuck onto the film peeling guide members and removing the film out of the apparatus; and guide member moving mechanism for causing the film peeling guide members to change their angular positions. Also, a related method is disclosed herein.

REFERENCES:
patent: 3883390 (1975-05-01), Cohen et al.
patent: 3951727 (1976-04-01), Greenberg
patent: 4631103 (1986-12-01), Ametani
patent: 4631110 (1986-12-01), Tsumura et al.
patent: 4770737 (1988-04-01), Seki
patent: 4798646 (1989-01-01), Sumi

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