Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material
Reexamination Certificate
2005-08-31
2009-06-16
Richards, N Drew (Department: 2895)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
Reexamination Certificate
active
07547620
ABSTRACT:
A method for producing a film pattern comprises a step of forming a resin film on a substrate surface; a step of incorporating into the resin film a constituent of a conductive film or a semiconductor film; a step of irradiating the resin film with an ultraviolet light; and a step of heating the resin film at a temperature not lower than a decomposition temperature of the resin to form a conductive film or a semiconductor film on the substrate, whereby the resin does not easily generate decomposition residues to improve precision and quality of the produced film pattern.
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Translation of JPP 2000-243254, published Sep. 8, 2000.
Furuse Tsuyoshi
Kagami Kazuhiro
Mizue Takeru
Mori Shosei
Terada Masahiro
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Richards N Drew
Singal Ankush K
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