Film measuring device and method with internal calibration to mi

Details Film measuring device and method with internal calibration to mi Film measuring device and method with internal calibration to mi

1987-07-22

1989-05-09

McGraw, Vincent P.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrophotometer

356328, G01J 336, G01J 342

Patent

active

048283878

ABSTRACT:
A method and apparatus for analysing the spectrum of light reflected by a reflecting structure (24) in which the effect upon the analysis results of variation in the angle between the reflecting structure and the incident beam (22) is minimised. The method and apparatus may utilise a dispersive element (26) constructed and arranged so as to minimise the effect of the variations. The method and apparatus may also utilise a calibration technique in which light with a known spectrum is reflected off the reflecting structure and analysed so that compensation may be made for the effect of the variation.

REFERENCES:
patent: 3985442 (1976-10-01), Smith et al.
patent: 4207467 (1980-06-01), Doyle et al.
patent: 4525066 (1985-06-01), Guillaume et al.
patent: 4664522 (1987-05-01), LeFebre
patent: 4676647 (1987-06-01), Kikkawa et al.

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