Film measuring apparatus and method

Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive

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250391, 250353, 356382, G01J 100

Patent

active

042074673

ABSTRACT:
An optical apparatus is disclosed which monitors the thickness of a thin film carried by a reflecting substrate. In order to minimize light detection problems caused by inadvertent displacement of the substrate, the light source and detector are located on the same "side" of the optical apparatus, and retro-reflector means are located at the other "side" of the optical apparatus, so that the light is reflected from the substrate to the retro-reflector means, back to the substrate, and thence back to the detector. In the preferred embodiment, the retro-reflector means comprises an array of small retro-reflectors.

REFERENCES:
patent: 2429066 (1947-10-01), Kughni
patent: 3198946 (1965-08-01), Atwood
patent: 3994586 (1976-11-01), Sharkins et al.

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