Film measurement system with improved calibration

Details Film measurement system with improved calibration Film measurement system with improved calibration

1997-01-29

1998-06-23

McGraw, Vincent P.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356328, 356369, G01J 336, G01N 2121

Patent

active

057710945

ABSTRACT:
The pixel position-to-wavelength calibration function of film measurement devices such as spectroscopic ellipsometers and spectroreflectometers may shift due to temperature and humidity changes and mechanical factors. One or more wavelength markers provided by the light source or reference sample may be used to correct the calibration function. The pixel positions of one or more persistent wavelength markers are noted during the calibration process and the current positions of such markers are again noted to account for shifts due to various factors to correct the calibration function.

REFERENCES:
patent: 4430000 (1984-02-01), Eldering et al.
patent: 4681444 (1987-07-01), Ferber et al.
patent: 5489980 (1996-02-01), Anthony

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