Film forming process

Details Film forming process Film forming process

1993-06-22

1995-04-11

Cannon, James C.

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

428201, 4283077, 428408, B32B 518, B32B 520, B32B 1504, B32B 1800, B32B 3300

Patent

active

054056764

ABSTRACT:
A first film having a low adhesion to a base material (substrate) is deposited on a base material. Pores reaching at least the surface of the base material are then formed through the first film at a high pore density (porosity), for example, according to photolithographic etching technology. Thereafter, a second film having a high adhesion to the base material is formed over the porous first film to fix, or secure, the porous first film to the base material. Recesses may be formed in a surface portion of the base material to further improve the fixation of the porous first film to the base material.

REFERENCES:
patent: 3152938 (1964-10-01), Osifchin et al.
patent: 4407695 (1983-10-01), Deckman et al.
patent: 4642163 (1987-02-01), Greschner et al.
patent: 4645734 (1987-02-01), Takada et al.
patent: 4664748 (1987-05-01), Ueno et al.
patent: 4784023 (1988-11-01), Dennis
patent: 5275693 (1994-01-01), Nakama

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