Film forming method, method for manufacturing organic...

Details Film forming method, method for manufacturing organic... Film forming method, method for manufacturing organic...

2011-08-02

2011-08-02

Kornakov, Michael (Department: 1714)

Coating processes

Nonuniform coating

C264S101000, C264S236000, C264S319000

Reexamination Certificate

active

07989025

ABSTRACT:
A film forming method for forming a film including arranging a liquid composition on a substrate and drying the liquid composition, the liquid composition being obtained by dissolving a functional material in a solvent with a plurality of species of liquid mixed therein, is provided. The method includes:a) firstly reducing a pressure surrounding the liquid composition arranged on the substrate at a first depressurizing speed;b) increasing the pressure surrounding the liquid composition to a predetermined pressures after the step a); andc) secondly reducing the pressure surrounding the liquid composition at a second depressurizing speed, after the step b).

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