Film forming method for manufacturing planar periodic...

Details Film forming method for manufacturing planar periodic... Film forming method for manufacturing planar periodic...

2004-03-05

2008-08-19

Bashore, Alain L. (Department: 1792)

Coating processes

Optical element produced

C427S164000, C427S266000, C427S287000, C427S466000, C427S064000

Reexamination Certificate

active

07413765

ABSTRACT:
A film-forming method is provided for forming a planar periodic structure having a predetermined periodicity by depositing liquid material on an object. A liquid drop supplying means is used which supplies a liquid drop at a predetermined driving period to deposit the liquid material on the object; the presence or absence of the supply of the liquid drop is controlled at each driving period in accordance with the periodicity of the planar periodic structure to be formed; and the liquid drop is supplied by controlling the liquid drop supplying means while the liquid drop supplying means is scanned at a predetermined scanning speed in a predetermined scanning direction relative to the object. A natural number times a value obtained by multiplying the driving period and the scanning speed is set to be the structural period of the planar periodic structure in the scanning direction.

REFERENCES:
patent: 6660332 (2003-12-01), Kawase et al.
patent: 6715852 (2004-04-01), Yonekubo
patent: 2002/0105688 (2002-08-01), Katagami et al.
patent: 2004/0051817 (2004-03-01), Takahashi et al.
patent: 2004/0081768 (2004-04-01), Furusawa et al.
patent: 2002-148422 (2002-05-01), None
patent: 2002-221616 (2002-08-01), None
patent: 2002-273868 (2002-09-01), None
JPO; Machine Translation of JP-2002-148422; 2008.

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