Coating processes – Measuring – testing – or indicating
Reexamination Certificate
2007-12-03
2011-12-06
Jolley, Kirsten C (Department: 1715)
Coating processes
Measuring, testing, or indicating
C427S240000, C427S377000, C118S052000, C118S665000, C118S712000, C438S758000
Reexamination Certificate
active
08071157
ABSTRACT:
There is disclosed a film forming method comprising continuously discharging a solution adjusted so as to spread over a substrate by a given amount to the substrate through a discharge port disposed in a nozzle, moving the nozzle and substrate with respect to each other, and holding the supplied solution onto the substrate to form a liquid film, wherein a distance h between the discharge port of the nozzle and the substrate is set to be not less than 2 mm and to be in a range less than 5×10−5qγ (mm) given with respect to a surface tension γ (N/m) of the solution, discharge speed q (m/sec) of the solution continuously discharged through the discharge port, and a constant of 5×10−5(m·sec/N).
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Ema Tatsuhiko
Hayasaki Kei
Ito Shin'ichi
Nakata Rempei
Okumura Katsuya
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Jolley Kirsten C
Kabushiki Kaisha Toshiba
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