Film forming method employing sub-electrodes aligned toward...

Details Film forming method employing sub-electrodes aligned toward... Film forming method employing sub-electrodes aligned toward...

2005-12-08

2008-12-09

Chen, Bret (Department: 1792)

Coating processes

Direct application of electrical, magnetic, wave, or...

Electrical discharge

C204S192380

Reexamination Certificate

active

07462380

ABSTRACT:
A particle film deposition method provides ultrafine particles generated by arc heating. An electrode is employed with at least two sub-electrodes each radially aligned toward the same part of a material. The material is evaporated by an arc discharge via the electrode, particles are generated from the evaporated material and the particles collide against a substrate.

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