Coating processes – Interior of hollow article coating – Coating by vapor – gas – mist – or smoke
Reexamination Certificate
2011-03-01
2011-03-01
Turocy, David (Department: 1715)
Coating processes
Interior of hollow article coating
Coating by vapor, gas, mist, or smoke
C427S248100, C427S255270, C427S255393
Reexamination Certificate
active
07897205
ABSTRACT:
A film forming method is characterized in that the method is provided with a step of introducing a processing gas including inorganic silane gas into a processing chamber, in which a mounting table composed of ceramics including a metal oxide is arranged, and precoating an inner wall of the processing chamber including a surface of the mounting table with a silicon-containing nonmetal thin film; a step of mounting a substrate to be processed on the mounting table precoated with the nonmetal thin film; and a step of introducing a processing gas including organic silane gas into the processing chamber, and forming a silicon-containing nonmetal thin film on a surface of the substrate mounted on the mounting table.
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Kameshima Takatoshi
Kawamura Kohei
Kobayashi Yasuo
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
Turocy David
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