Film forming device

Details Film forming device Film forming device

2002-02-08

2010-02-16

Zervigon, Rudy (Department: 1792)

Coating apparatus

Control means responsive to a randomly occurring sensed...

Temperature responsive

C118S7230AN, C156S345240, C156S345270, C156S345340, C156S345370

Reexamination Certificate

active

07661386

ABSTRACT:
A film-forming apparatus of the invention is a film-forming apparatus that includes: a processing container that defines a chamber, a pedestal arranged in the chamber, on which a substrate to be processed can be placed, a showerhead provided opposite to the pedestal, which has a large number of gas-discharging holes, a gas-supplying mechanism that supplies a process gas into the chamber through the showerhead, and a showerhead-temperature controlling unit that controls a temperature of the showerhead.

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International Preliminary Examination Report (PCT/IPEA/409) (translated) issued for PCT/JP02/01110.
Notification of Transmittal of Copies of Translation of the International Preliminary Examination Report (PCT/IB/338) issued for PCT/JP02/01110.

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