Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to condition of coating material
Reexamination Certificate
2005-05-06
2009-12-29
Edwards, Laura (Department: 1792)
Coating apparatus
Control means responsive to a randomly occurring sensed...
Responsive to condition of coating material
C118S666000, C118S667000, C118S708000, C118S052000, C118S056000, C118S319000, C118S320000, C702S081000, C702S082000, C702S084000
Reexamination Certificate
active
07638001
ABSTRACT:
A film forming apparatus which forms a film on a substrate by utilizing a chemical solution, including: a correlation data creating unit which creates a correlation data that is related to the quality of a chemical solution, from data that is related to the properties of the chemical solution including at least one of data on storage temperature for the chemical solution to be loaded and data on pressure applied to the chemical solution to be loaded; and a determining unit which determines whether or not the chemical solution holds expected quality thereof on the bases of the correlation data.
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Notification of Reasons for Rejection, mailed Mar. 27, 2009, from the Japan Patent Office in Japanese Patent Application No. 2004-138378, and English language translation thereof.
Edwards Laura
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Kabushiki Kaisha Toshiba
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