Film forming apparatus, head cleaning method, device...

Details Film forming apparatus, head cleaning method, device... Film forming apparatus, head cleaning method, device...

2006-08-15

2006-08-15

Carrillo, Sharidan (Department: 1746)

Cleaning and liquid contact with solids

Processes

Using solid work treating agents

C134S040000, C134S042000, C347S033000

Reexamination Certificate

active

07090728

ABSTRACT:
A system and method for reliably cleaning the nozzle face of each head while flexibly coping with changes in specification for a product to be manufactured. The film forming apparatus has a plurality of heads for jetting droplets, each having an nozzle in a nozzle face; and a common head cleaning mechanism for collectively cleaning the nozzle faces, so that the head cleaning mechanism is not substantially affected by a change in the pitch between the heads, or the like. Typically, the head cleaning mechanism has a wiping sheet for wiping the nozzle faces; a supply unit for feeding the wiping sheet towards the nozzle faces; and a roller for pressing the wiping sheet against the nozzle faces while the wiping sheet is fed from the supply unit, so that an unused cleaning face can always be supplied to each nozzle face.

REFERENCES:
patent: 5793390 (1998-08-01), Claflin et al.
patent: 5963229 (1999-10-01), Fukuoka
patent: 6460967 (2002-10-01), Makita et al.
patent: 6464326 (2002-10-01), Weeks
patent: 6517187 (2003-02-01), Dietl et al.
patent: 2002/0109744 (2002-08-01), Shindo
patent: 2003/0007049 (2003-01-01), Hino
patent: 2003/0081054 (2003-05-01), Nakagawa et al.
patent: 2003/0197754 (2003-10-01), Nakamura
patent: 1 074 861 (2001-02-01), None
patent: 06-155754 (1994-06-01), None
patent: A 2000-103086 (2000-04-01), None
patent: A 2000-177153 (2000-06-01), None
patent: A 2001-150690 (2001-06-01), None
patent: P2002-0009010 (2002-02-01), None

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