Film forming apparatus and jetting nozzle

Details Film forming apparatus and jetting nozzle Film forming apparatus and jetting nozzle

2011-01-11

2011-01-11

Nguyen, Dinh Q (Department: 3752)

Fluid sprinkling, spraying, and diffusing

Rigid fluid confining distributor

Having interior filter or guide

C239S590000, C239S594000, C239S518000, C239S432000, C239S433000

Reexamination Certificate

active

07866578

ABSTRACT:
A film forming apparatus includes an aerosol generating section which generates an aerosol; a jetting nozzle having an internal passage formed therein and through which the aerosol flows, the internal passage having one end serving as a supply port of the aerosol and having other end serving as a jetting port of the aerosol; a narrowed channel which is provided in the internal passage and which has a channel area narrower than a channel area on an upstream of the narrowed channel; and a collision portion which is provided in the internal passage on a downstream of the narrowed channel, and against which a flow of the aerosol passed through the narrowed channel collides. Since the aggregated particles are crushed and supplied from the jetting nozzle in the form of fine particles, a thin and uniform film can be formed on the process-objective material.

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European Patent Office, European Search Report for Related Application No. EP 06017586, dated May 2, 2007.

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