Film forming apparatus and film forming method

Details Film forming apparatus and film forming method Film forming apparatus and film forming method

2011-03-29

2011-03-29

Tadesse, Yewebdar T (Department: 1713)

Coating apparatus

Projection or spray type

With projector heating, cleaning or conditioning

C118S667000, C118S682000, C118S688000, C239S302000, C239S601000

Reexamination Certificate

active

07913643

ABSTRACT:
A film forming apparatus is provided which includes a device A that generates liquid fine particles having controlled particle diameters; a device B including a via for guiding the generated liquid fine particles while controlling a temperature thereof; a device C that sprays the guided liquid fine particles; and a device D including a space for forming a transparent conductive film by coating the sprayed liquid fine particles onto a subject to be processed.

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