Coating apparatus – Immersion or work-confined pool type – Floating film or layer of coating material
Patent
1985-04-16
1987-06-23
Lawrence, Evan K.
Coating apparatus
Immersion or work-confined pool type
Floating film or layer of coating material
118423, 118425, B05C 310
Patent
active
046744363
ABSTRACT:
An apparatus for forming a monomolecular film or a monomolecular built-up film on a substrate, which comprises a tank, a frame for dividing a liquid surface in the tank and a support for moving the substrate horizontally in the liquid without disordering the liquid surface within the frame which contains the film.
REFERENCES:
patent: 4490413 (1984-12-01), Stimson
patent: 4511604 (1985-04-01), Barraud et al.
Eguchi Ken
Miyazaki Toshihiko
Munakata Hirohide
Nishimura Yukuo
Sugawa Etsuko
Canon Kabushiki Kaisha
Lawrence Evan K.
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