Film formation apparatus

Details Film formation apparatus Film formation apparatus

2007-03-06

2007-03-06

Koch, George (Department: 1734)

Coating apparatus

Control means responsive to a randomly occurring sensed...

Condition of coated material

C118S688000, C118S712000

Reexamination Certificate

active

11293219

ABSTRACT:
A film formation apparatus by which a film thickness can be precisely measured and whether the film quality is good or bad can be confirmed in a process of performing film formation according to the aerosol deposition method. The film formation apparatus includes: an aerosol generating unit for generating an aerosol by dispersing a raw material powder by a gas; a holding unit for holding a substrate on which a structure is to be formed; a nozzle for injecting the aerosol generated by the aerosol generating unit toward the substrate; and a measurement unit for measuring an electric potential of a film formation surface on the substrate.

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patent: 2001-348659 (2001-12-01), None
patent: 2002-030421 (2002-01-01), None
Machine Translation of JP 2001-348659 (Submitted with.

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