Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate
2006-12-19
2006-12-19
Hassanzadeh, Parviz (Department: 1763)
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
C204S298090, C204S298280
Reexamination Certificate
active
07150792
ABSTRACT:
The present invention provides a film deposition system capable of effectively cooling a work having a large volume, and a film deposition method using this system. The film deposition system has, within a vacuum chamber1, an evaporation source3for forming a film on a work2and a cooling device4for cooling the work2, characterized in that the work2has an internal space15communicating with the outside through an opening part14, and the cooling device4is insertable to and drawable from the internal space15through the opening part14of the work2to cool the work2from the inside.
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Fujii Hirofumi
Kumakiri Tadashi
Shimojima Katuhiko
(Kobe Steel, Ltd.)
Hassanzadeh Parviz
MacArthur Sylvia R.
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
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