Film deposition equipment

Details Film deposition equipment Film deposition equipment

1983-03-31

1985-07-02

Smith, John D.

Coating processes

Measuring, testing, or indicating

427 39, 4272553, 118726, 118692, 118667, 204192N, C23C 1300

Patent

active

045268029

ABSTRACT:
This film deposition equipment is arranged so that metal is evaporated in atmosphere including reactive gas introduced in a vacuum, and pressure variation of the reactive gas caused by the metal evaporation is detected to know and control metal evaporation amount.

REFERENCES:
patent: 4287224 (1981-09-01), Heimbach et al.

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