Film deposition device

Details Film deposition device Film deposition device

2008-04-08

2008-04-08

Kackar, Ram N. (Department: 1792)

Coating apparatus

With indicating, testing, inspecting, or measuring means

C118S7230AN, C156S345280, C204S298010

Reexamination Certificate

active

10954145

ABSTRACT:
A film deposition device for depositing a film includes a depositing chamber for depositing the film with plasma. A plasma quantity monitoring device is disposed in the depositing chamber for monitoring a plasma quantity entering the depositing chamber at real time. A calculating device is electrically connected to the plasma quantity monitoring device for calculating a thickness of the film from the plasma quantity so that the thickness is monitored at real time.

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patent: 57087829 (1982-06-01), None
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