Film depositing apparatus, a film depositing method, a...

Details Film depositing apparatus, a film depositing method, a... Film depositing apparatus, a film depositing method, a...

2009-08-12

2011-11-01

Feggins, Kristal (Department: 2861)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

C204S298150

Reexamination Certificate

active

08047636

ABSTRACT:
A film depositing apparatus comprises: a process chamber; a target holder provided in the process chamber for holding a target; a substrate holder for supporting a deposition substrate such that the deposition substrate faces the target holder in the process chamber; a power supply for supplying electric power between the target holder and the substrate holder to generate plasma in the process chamber; and an anode provided between the target holder and the substrate holder for capturing ions and/or electrons in the plasma being generated within the process chamber, wherein the anode includes: a cylindrical member provided so as to surround an outer periphery of a side of the substrate holder that faces the target holder; and at least one annular plate member attached to an inside wall of the cylindrical member, the plate member having a central opening larger than a surface of the deposition substrate.

REFERENCES:
patent: 4721553 (1988-01-01), Saito et al.
patent: 7226151 (2007-06-01), Murai
patent: 7422315 (2008-09-01), Hori
patent: 2008/0081128 (2008-04-01), Fujii

Affiliated with

Also associated with

Rating

Film depositing apparatus, a film depositing method, a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Film depositing apparatus, a film depositing method, a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Film depositing apparatus, a film depositing method, a... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4289973