Film circuit substrate exposure apparatus

Details Film circuit substrate exposure apparatus Film circuit substrate exposure apparatus

1990-01-24

1991-06-04

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 26, G03B 2732, G03B 2742, G03B 2752

Patent

active

050218212

ABSTRACT:
A film circuit substrate exposure apparatus is disclosed, in which members movable along an optical axis such as a reticle support, a projection lens and a film pressing member are mounted on a common linear movement guide by using a linear movement driver, for instance a cross roller guide, in a predetermined spaced-apart relation to one another to set the optical axis and without inclination with respect to the optical axis. The apparatus thus pronounced practical merits such as freedom from rattling, capability of ready positioning and focusing operations, less partial out of focus or aberration of obtainable patterns, and particularly elimination of complicated operations in double side exposure.

REFERENCES:
patent: 3228284 (1966-01-01), Kallenberg
patent: 3531198 (1970-09-01), Delp
patent: 3998546 (1976-12-01), Wally, Jr. et al.
"Tape Automated Bonding", Microelectronics Packaging Handbook, 1989, pp. 409-435.

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