Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2006-07-04
2006-07-04
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S189000, C029S025350
Reexamination Certificate
active
07071795
ABSTRACT:
A film bulk acoustic wave resonator wafer of the present invention prevents electric discharge from occurring in the process of fabricating a film bulk acoustic wave resonator, thereby enhancing product reliability and yield. The film bulk acoustic wave resonator wafer of the present invention comprises a substrate, a lower electrode and an upper electrode provided on the substrate and a piezoelectric film provided between the lower electrode and upper electrode. The lower electrode and upper electrode are shorted through a window provided in the piezoelectric film. Since the lower electrode and upper electrode are therefore kept at the same potential, no electric discharge passing through the piezoelectric film occurs even during the formation of a protective film covering the upper electrode, dicing of the substrate and other processes in which discharge has heretofore been likely to occur.
REFERENCES:
patent: 6894360 (2005-05-01), Bradley
patent: 56-129759 (1983-02-01), None
Summons Barbara
TDK Corporation
Young Law Firm P.C.
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