Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2005-06-30
2008-12-09
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S189000, C310S324000, C310S364000
Reexamination Certificate
active
07463117
ABSTRACT:
A film bulk acoustic-wave resonator encompasses a substrate having a cavity; a bottom electrode partially fixed to the substrate, part of the bottom electrode is mechanically suspended above the cavity; a piezoelectric layer provided on the bottom electrode; and a top electrode provided on the piezoelectric layer having crystal axes oriented along a thickness direction of the piezoelectric layer, a full width at half maximum of the distribution of the orientations of the crystal axes is smaller than or equal to about six degrees.
REFERENCES:
patent: 5587620 (1996-12-01), Ruby et al.
patent: 7002437 (2006-02-01), Takeuchi et al.
patent: 2004/0185594 (2004-09-01), Nishihara et al.
patent: 2004/0189423 (2004-09-01), Loebl et al.
patent: 2005/0035829 (2005-02-01), Umeda et al.
patent: 2005/0093157 (2005-05-01), Noguchi et al.
patent: 2005/0184627 (2005-08-01), Sano et al.
patent: 2005/0191792 (2005-09-01), Noguchi et al.
patent: 1 124 328 (2001-08-01), None
patent: 2000-69594 (2000-03-01), None
patent: 2001-156582 (2001-06-01), None
patent: 2001-274650 (2001-10-01), None
patent: 2001-313535 (2001-11-01), None
patent: 2001-326553 (2001-11-01), None
patent: 2002-141483 (2002-05-01), None
patent: 2003-163566 (2003-06-01), None
patent: 2003-198319 (2003-07-01), None
patent: 2003-204239 (2003-07-01), None
patent: 2004-95843 (2004-03-01), None
patent: WO 03/017481 (2003-02-01), None
T. Yokoyama, et al. “New Electrode Material for Low-Loss and High-Q FBAR Filters”, 2004 IEEE Ultrasonic Symposium, Aug. 23-27, 2004, vol. 1, pp. 429-432.
U.S. Appl. No. 11/043,257, filed Jan. 27, 2005, Kenya Sano, et al.
U.S. Appl. No. 11/108,671, filed Apr. 19, 2005, Kenya Sano, et al.
U.S. Appl. No. 11/115,158, filed Jan. 27, 2005, Kazuhiko Itaya, et al.
U.S. Appl. No. 10/890,989, filed Jul. 15, 2004, Yasuo Ebuchi, et al.
U.S. Appl. No. 11/671,206, filed Feb. 5, 2007, Ohara, et al.
U.S. Appl. No. 11/761,767, filed Jun. 12, 2007, Sano, et al.
Abe Kazuhide
Itaya Kazuhiko
Kawakubo Takashi
Nagano Toshihiko
Nishigaki Michihiko
Kabushiki Kaisha Toshiba
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Summons Barbara
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