Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2007-09-11
2007-09-11
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C310S322000, C310S324000, C257S416000, C438S048000, C438S053000, C029S025350, C333S189000
Reexamination Certificate
active
11626270
ABSTRACT:
A film bulk acoustic-wave resonator having, a substrate having a cavity, the substrate being formed of one of semi-insulating material and high-resistivity material, a bottom electrode partially fixed to the substrate, part of the bottom electrode is mechanically suspended above the cavity, a piezoelectric layer disposed on the bottom electrode, the shape of the piezoelectric layer is defined by a contour, a top electrode on the piezoelectric layer, a semiconductor intermediate electrode buried at and in a surface of the substrate, being located at the contour of the piezoelectric layer, the semiconductor region having a lower resistivity than the substrate, the intermediate electrode is connected to the bottom electrode in the inside of the contour, and a bottom electrode wiring connected to the semiconductor intermediate electrode extending from the contour to an outside of the contour in the plan view.
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Itaya Kazuhiko
Kawakubo Takashi
Motai Takako
Ohara Ryoichi
Sano Kenya
Kabushiki Kaisha Toshiba
Summons Barbara
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