Film bulk acoustic wave device

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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310311, H01L 2966

Patent

active

057898456

ABSTRACT:
Embodiments of the present invention provide a small and well-characterized bulk acoustic wave device by fabricating a filter having a wide band width or a resonator having a wide oscillation frequency range together with a semiconductor circuit. In embodiments of the present invention, a bulk acoustic wave device comprises a semiconductor substrate having a dielectric substance layer thereon, the dielectric substance layer has a ground conductor layer thereon, the ground conductor layer has a piezoelectric ceramic thin film thereon and the piezoelectric ceramic thin film has a conductive electrode pattern thereon. The thickness of the piezoelectric ceramic thin film is more than ten times the thickness of the ground conductor layer, and the wave number of acoustic waves that propagate in a direction parallel to a surface of the piezoelectric ceramic thin film multiplied by the thickness of the piezoelectric ceramic thin film is less than 2.

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Yoichi Miyasaka, Shigeki Hoshino & Sadayuki Takahashi "Advances in Structure and Fabrication Process For Thin Film Acoustic Resonator" 1987 Ultrasonics Symposium IEEE.
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