Wave transmission lines and networks – Plural channel systems – Having branched circuits
Reexamination Certificate
2011-07-12
2011-07-12
Summons, Barbara (Department: 2817)
Wave transmission lines and networks
Plural channel systems
Having branched circuits
C333S187000, C333S189000, C310S322000
Reexamination Certificate
active
07978025
ABSTRACT:
There is provided a film bulk acoustic resonator which has a substrate, a lower electrode formed on the substrate, a piezoelectric membrane formed on the lower electrode, an upper electrode formed on the piezoelectric membrane, and an insulating film disposed adjacent to the piezoelectric membrane between the upper electrode and the substrate and at a position at which the upper electrode and the substrate are opposed each other. The substrate is preferably formed so as to form a void at a portion facing to the lower electrode. The lower electrode has preferably a tapered end and a part of the boundary between the piezoelectric membrane and the insulating film is disposed on an inside from the upper end of the tapered end.
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English language machine translation of JP 2005-303573, pp. 1-15, published Oct. 27, 2005.
English language Derwent abstract of JP 2005-303573, pp. 1-2, published Oct. 27, 2005.
Chinese patent application No. 200910003011.4 and its translation, Dec. 8, 2010.
Ueda Masanori
Yokoyama Tsuyoshi
Arent & Fox LLP
Summons Barbara
Taiyo Yuden Co. Ltd.
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