Film bulk acoustic resonator, filter circuit and method for...

Details Film bulk acoustic resonator, filter circuit and method for... Film bulk acoustic resonator, filter circuit and method for...

2006-07-17

2008-10-28

Tan, Vibol (Department: 2819)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S189000, C333S133000, C310S312000, C310S320000

Reexamination Certificate

active

07443270

ABSTRACT:
A film bulk acoustic resonator includes a substrate having a cavity at a surface of the substrate; a bottom electrode provided on the surface of the substrate so as to extend over the cavity; a piezoelectric film disposed on the bottom electrode; a top electrode disposed on the piezoelectric film so as to face the bottom electrode and extending over the surface of the substrate; and a seal member configured to seal a capacitor defined by the bottom electrode, the piezoelectric film and the top electrode, and to provide an opening portion of the cavity outside the seal member at the surface of the substrate.

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patent: 2004-111767 (2004-04-01), None

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