Film bulk acoustic resonator filter

Details Film bulk acoustic resonator filter Film bulk acoustic resonator filter

2007-04-03

2007-04-03

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S365000, C310S366000, C333S189000

Reexamination Certificate

active

10718799

ABSTRACT:
A ladder-type film bulk acoustic resonator (FBAR) filter comprises two series FBARs and two parallel FBARs. Each FBAR has a top electrode, a bottom electrode, and a piezoelectric layer sandwiched between the top and bottom electrodes. The top electrodes of the two series FBARs form part of a signal line of a coplanar waveguide transmission line. The top electrodes of the two series FBARs are connected to associated circuitry. The two series FBARs have a common bottom electrode.

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