Film bulk acoustic resonator (FBAR) with high thermal...

Details Film bulk acoustic resonator (FBAR) with high thermal... Film bulk acoustic resonator (FBAR) with high thermal...

2007-01-16

2007-01-16

Dougherty, Tom (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S342000, C310S346000, C310S349000, C310S347000, C333S229000, C333S234000, C333S191000, C333S187000

Reexamination Certificate

active

10607679

ABSTRACT:
The specification discloses embodiments of an apparatus comprising a film bulk acoustic resonator (FBAR) filter comprising a piezoelectric membrane having a portion thereof sandwiched between a first electrode and a second electrode, the piezoelectric membrane being suspended from at least two edges thereof, and a heat transfer layer placed on the piezoelectric membrane surrounding, but not in contact with, the first electrode. Also disclosed are embodiments of a process comprising sandwiching a portion of the piezoelectric membrane between a first electrode and a second electrode, suspending a piezoelectric membrane from at least two edges thereof, and placing a heat transfer layer on the piezoelectric membrane surrounding, but not in contact with, the first electrode. Other embodiments are disclosed and claimed.

REFERENCES:
patent: 6507093 (2003-01-01), Kaneda et al.
patent: 2004/0056735 (2004-03-01), Nomura et al.
patent: 1217734 (2002-06-01), None

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