Film bulk acoustic resonator (FBAR) device

Details Film bulk acoustic resonator (FBAR) device Film bulk acoustic resonator (FBAR) device

2005-01-11

2005-01-11

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S191000, C310S324000, C310S349000

Reexamination Certificate

active

06842089

ABSTRACT:
Disclosed are a film bulk acoustic resonator (FBAR) device and a method for fabricating the film bulk acoustic resonator (FBAR) device. The film bulk acoustic resonator (FBAR) device comprises a membrane layer having a plurality of active regions and provides different resonant frequencies by providing different thicknesses of the active regions of series resonators and shunt resonators, and by controlling the thicknesses, respectively. A plurality of the film bulk acoustic resonator (FBAR) devices having different resonant frequencies are manufactured on a substrate, thereby simultaneously manufacturing a transmission filter and a reception filter on the same substrate. Further, the film bulk acoustic resonator (FBAR) device has a stable structure and excellent characteristics.

REFERENCES:
patent: 5873153 (1999-02-01), Ruby et al.
patent: 5910756 (1999-06-01), Ella
patent: 6051907 (2000-04-01), Ylilammi
patent: 6107721 (2000-08-01), Lakin
patent: 6262637 (2001-07-01), Bradley et al.
patent: 6355498 (2002-03-01), Chan et al.
patent: 6693500 (2004-02-01), Yang et al.
“Thin Film Bulk Acoustic Wave Filters for GPS” by K.M. Lakin et al., IEEE Ultrasonic Symposium, 1992, pp. 471-476.

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