Film bulk acoustic resonator and method of producing the same

Details Film bulk acoustic resonator and method of producing the same Film bulk acoustic resonator and method of producing the same

2008-01-29

2008-01-29

Takaoka, Dean (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S189000

Reexamination Certificate

active

07323953

ABSTRACT:
A film bulk acoustic resonator includes: a piezoelectric thin film that is formed on a principal surface of a substrate; and a lower electrode and an upper electrode that are arranged to sandwich the piezoelectric thin film. In this film bulk acoustic resonator, the piezoelectric thin film is made of aluminum nitride, and at least one of the lower electrode and the upper electrode contains a ruthenium or ruthenium-alloy layer.

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