Film bulk acoustic resonator and filter circuit including a...

Details Film bulk acoustic resonator and filter circuit including a... Film bulk acoustic resonator and filter circuit including a...

2007-06-26

2007-06-26

Gandhi, Jayprakash (Department: 2809)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C310S312000, C310S367000, C257S001000, C257S009000

Reexamination Certificate

active

11197399

ABSTRACT:
A film bulk acoustic resonator includes a first electrode, a piezoelectric film disposed on the first electrode, a second electrode disposed on the piezoelectric film or disposed above the piezoelectric film, and an additional film disposed on and abutting the piezoelectric film. The additional film has at least one pair of opposite sides which are non-parallel with each other. The additional film includes a plurality of stripe-shaped openings.

REFERENCES:
patent: 6150703 (2000-11-01), Cushman et al.
patent: 6215375 (2001-04-01), Larson, III et al.
patent: 6483229 (2002-11-01), Larson, III et al.
patent: 2004/0017130 (2004-01-01), Wang et al.

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