Film bulk acoustic resonator

Details Film bulk acoustic resonator Film bulk acoustic resonator

2006-02-07

2006-02-07

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S326000

Reexamination Certificate

active

06995497

ABSTRACT:
A film bulk acoustic resonator of the present invention includes an upper electrode104, a lower electrode102, and a piezoelectric film103as well as an acoustic multilayer120that are provided between the upper electrode104and the lower electrode102. Thus, a distance between the upper electrode104and the lower electrode102is extended by a thickness of the acoustic multilayer120, and electrostatic capacitance between the upper electrode104and the lower electrode102per unit area can be reduced accordingly. Therefore, an electrode area can be increased as compared to when there is no acoustic multilayer120, and an influence of grains of a piezoelectric material can be reduced.

REFERENCES:
patent: 5872493 (1999-02-01), Ella
patent: 5936150 (1999-08-01), Kobrin et al.
patent: 6339276 (2002-01-01), Barber et al.
patent: 6452310 (2002-09-01), Panasik
patent: 6603241 (2003-08-01), Barber et al.
patent: 6720844 (2004-04-01), Lakin
patent: 2002/0185936 (2002-12-01), Barber et al.

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